Simulation of piezo-resistive metal gauge on rectangular membrane for low pressure application

Mohd Yunus Hamid, and U., Thangamani and P., R. Vaya (2006) Simulation of piezo-resistive metal gauge on rectangular membrane for low pressure application. In: IEEE International Conference on Semiconductor Electronics , 29 Nov-01 Disember 2006 , Kuala Lumpur, Malaysia.

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Official URL: http://dx.doi.org/10.1109/SMELEC.2006.381070

Abstract

Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to rind out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro-ohm are achieved for an applied load of lmPa. The sensitivity of the gauge is 0.35 mu epsilon/mPa.

Item Type:Conference Paper (UNSPECIFIED)
Uncontrolled Keywords:Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Remote Sensing, Optics, Physics, Condensed Matter
Subjects:?? TK7800-8360 ??
Divisions:SCHOOL > School of Engineering and Information Technology
ID Code:1077
Deposited By:IR Admin
Deposited On:07 Oct 2011 11:32
Last Modified:29 Dec 2014 16:25

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