Comparison analysis on scaling the vertical and lateral NMOSFET in nanometer regime

Ismail Saad, and Ima Sulaiman, and Razali Ismail, (2008) Comparison analysis on scaling the vertical and lateral NMOSFET in nanometer regime. Sains Malaysiana, 37 (3). pp. 239-243. ISSN 0126-6039

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Official URL: http://pkukmweb.ukm.my/~jsm/english_journals/vol37...

Abstract

Conventional lateral and vertical n-channel MOS transistors with channel length in the range of 100 nm to 50 nm have been systematically investigated by means of device simulation. The comparison analysis includes critical parameters that govern device performance. Threshold voltage V-T roll-off, leakage current I-off drain saturation current I-Dsat and subthreshold swing S were analyze and compared between the device. Due to double gate (DG) structure over the side of silicon pillar a better electrostatics potential control of channel is obtained in vertical device shown by, an analysis on V-T roll-off. A two decade higher of I-off in planar device is observed with L-g = 50 nm. A factor of three times larger I-Dsat is observed for vertical MOSFETs compared to planar device. The sub-threshold swing S remains almost the same when the L-g larger than 80 nm. It increased rapidly when the L-g is scaled down to 50 nm due to the short channel effect SCE. However, the vertical device has a steady increase whereas the planar device has suffered immediate enhance of SCE. The analysis results confirmed that vertical MOSFET with double-gate structure is a potential solution to overcome SCE when scaled the channel length to 50 nm and beyond.

Item Type:Article
Uncontrolled Keywords:Vertical MOSFET, DIBL, Double gate, Surrounding gate
Subjects:?? TK9001-9401 ??
Divisions:SCHOOL > School of Engineering and Information Technology
ID Code:1296
Deposited By:IR Admin
Deposited On:07 Sep 2011 10:49
Last Modified:17 Feb 2015 15:17

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