Ismail Saad and Munawar Agus Riyadi and Razali Ismail and Vijay K. Arora (2008) Self-aligned double-gate (DG) vertical MOSFET's using oblique rotating implantation (ORI) method with reduced parasitic capacitance. In: 2008 IEEE International Conference on Semiconductor Electronics (ICSE 2008), 25-27 November 2008, Johor, Malaysia.
Full text not available from this repository.Abstract
Enhanced symmetrical self-aligned double-gate (DG) vertical nMOSFET with low parasitic capacitance is presented. The process utilizes the oblique rotating ion implantation (ORI) method combined with fillet local oxidation (FILOX) technology (FILOX + ORT). Self-aligned region forms a sharp vertical channel profile that increased the number of electrons in the channel. These have improved drive-on current and drain-induced-barrier-lowering (DIBL) effect with a reduced off-state leakage current tremendously. The gate-to-drain capacitance is significantly reduced while has a small difference of gate-to-source capacitance compared to FILOX device. The drain overlap capacitance is a factor of 0.2 lower and the source overlap capacitance is a factor of 1.5 lower than standard vertical MOSFETs. © 2008 IEEE.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Keyword: | Drain overlap, Drain-induced-barrier-lowering effects, Fillet local oxidations, Gate-to-drain capacitance, Low-parasitic, NMOSFET, Number of electrons, Off-state leakage current, On currents, Overlap capacitance, Parasitic capacitance, Self aligned double gates, Self-aligned, Vertical channels, Vertical MOSFET, Vertical MOSFETs |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK1-9971 Electrical engineering. Electronics. Nuclear engineering > TK7800-8360 Electronics |
| Department: | SCHOOL > School of Engineering and Information Technology |
| Depositing User: | ADMIN ADMIN |
| Date Deposited: | 25 Mar 2011 13:11 |
| Last Modified: | 30 Dec 2014 15:00 |
| URI: | https://eprints.ums.edu.my/id/eprint/1607 |
Actions (login required)
 |
View Item |