Aluminium interdigitated electrode with 5.0 μm gap for electrolytic scooting

M. N. Afnan Udaa and Uda Hashima and M. N. A. Uda and Tijjani Adamd and Asral Bahari Jambekd and Ismail Saad and N. A. Parmin and Shahidah Arina Shamsuddin and N. A Karime and G. Yashnif and Nur Hulwani Ibrahim and N. Parimona and M. F. H. Rani (2023) Aluminium interdigitated electrode with 5.0 μm gap for electrolytic scooting. International Journal of Nanoelectronics and Materials (IJNeaM), 17. pp. 237-243. ISSN 198-5761

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URL: https://ejournal.unimap.edu.my/index.php/ijneam/ar...

Abstract

The goal of the research project is to design, fabricate, and characterize an extremely sensitive biosensor for use in healthcare. Using AutoCAD software, a novel IDE pattern with a 5 µm finger gap was created. Conventional photolithography and regular CMOS technology were used in the fabrication process. A 3D nano profiler, scanning electron microscopy (SEM), high-power microscopy (HPM), and low-power microscopy (LPM) were used to physically characterize the manufactured IDE. Chemical testing was done using several pH buffer solutions, and electrical validation was performed using I-V measurements. The Al IDE was produced, with a tolerance of 0.1 µm between the fabricated IDEs and the design mask. Electrical measurements verified the flawless fabrication of the IDE, and the device's repeatability was validated by the outcomes of comparable IDE samples. For each pH buffer solution, a modest additional volume of 2 µl was used to quantitatively detect slight current fluctuations in the microampere range. Through pH calibration for advanced applications in the realm of chemical sensors using an amperometric method, this research study has verified the chemical behavior of the IDE.

Item Type:	Article
Keyword:	Aluminium, Amperometric, Biosensor, Interdigitated Electrode, Surface chemistry
Subjects:	Q Science > QD Chemistry > QD1-999 Chemistry T Technology > TA Engineering (General). Civil engineering (General) > TA1-2040 Engineering (General). Civil engineering (General)
Department:	FACULTY > Faculty of Engineering
Depositing User:	SITI AZIZAH BINTI IDRIS -
Date Deposited:	14 Oct 2024 11:11
Last Modified:	14 Oct 2024 11:11
URI:	https://eprints.ums.edu.my/id/eprint/41359

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