Influence of deposition time on the structure and optical properties of CuGaO2 thin films

Saturi Baco and Nur Asilah Mohd Adnan and Nur Alfatini Suhardi and Rubena Yusoff and Chee, Fuei Pien and Saafie Salleh and Afishah Alias (2024) Influence of deposition time on the structure and optical properties of CuGaO2 thin films.

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Abstract

Copper gallium oxide (CuGaO2) is a transparent p-type semiconductor with a wide bandgap, making it highly relevant for semiconductor technology. This study explores how deposition time impact the structure and optical properties of CuGaO2 thin films. Using radio frequency magnetron sputtering, the films were deposited on the glass substrate with deposition times ranging from 30 to 120 minutes. The grain size of the films was analyzed using X-ray diffraction (XRD), which revealed that the films remained amorphous regardless of the deposition time. However, optical characteristic measured by UV-VIS Spectrophotometer indicated that extending the deposition time from 30 minutes to 90 minutes increased the bandgap from 2.27 eV to 2.68 eV.

Item Type:	Proceedings
Keyword:	Thin film, Structure properties, Optical properties, Semiconductor
Subjects:	Q Science > Q Science (General) > Q1-390 Science (General) T Technology > T Technology (General) > T1-995 Technology (General)
Department:	FACULTY > Faculty of Science and Natural Resources
Depositing User:	SITI AZIZAH BINTI IDRIS -
Date Deposited:	17 Mar 2025 11:07
Last Modified:	17 Mar 2025 11:07
URI:	https://eprints.ums.edu.my/id/eprint/43216

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